さすがに => understandably N2
Base, base
にする => にする N4
さえ/にさえ/でさえ => Even N3
Not only, Not even
さすがの...も => even ~also N2
The highest (comparative) level
さすが => as one would expect N2
Evaluate
でござる/でございます => By, with… N4
Honorifics
する => become ... N4
Situation, case
さえ/でさえ => even; so much as; not even N3
なさる => to do (honorific) N4
すら/ですら => even ~ (with emphasis) N1
ですか => Isn't it? N5
だ/です => to be N5