immersion; dipping; in microscopy, immersing both the objective lens and the specimen in a liquid to increase the numerical aperture; in photolithography, filling the air gap between the final lens and the wafer surface with a liquid to increase the resolution
◆ immersion; dipping; in microscopy, immersing both the objective lens and the specimen in a liquid to increase the numerical aperture; in photolithography, filling the air gap between the final lens and the wafer surface with a liquid to increase the resolution